PUMP DEVICE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150086402A1
SERIAL NO

14386641

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pump device (1) according to an embodiment of the present invention includes a drive motor (M), a first pump unit for evacuation (11) including a first pump chamber and a first piston (21v), and a second pump unit for pressurization (12) including a second pump chamber and a second piston (21c). The second piston (21c) has a phase advanced with a rotational phase difference (φ) of more than 0° and less than 80° with respect to the first piston (21v).

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Patent Owner(s)

Patent OwnerAddress
ULVAC KIKO INC291-7 CHAUSUBARU OAZA SAITO-SHI MIYAZAKI 881-0037

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chouno, Motoyasu Miyazaki, JP 1 0
Itoyama, Ryuji Miyazaki, JP 5 16
Osaka, Taisuke Miyazaki, JP 4 24
Tanabe, Yusaku Miyazaki, JP 3 16

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