SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT APPARATUS
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United States of America Patent
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Mar 26, 2015
app pub date -
Sep 18, 2014
filing date -
Sep 24, 2013
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Abstract
A shape measurement method includes acquiring a plurality of partial measurement data sets of a measurement surface and inclination data corresponding to the partial measurement data sets; performing fitting of the partial measurement data sets so that differences between a reference equation and the partial measurement data sets are reduced, while the relative tilt between the partial measurement data sets is maintained less than or equal to a predetermined threshold; and obtaining the shape of the measurement surface by connecting the fitted partial measurement data sets.
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