Insoluble Anode With a Plurality of Switchable Conductive Elements Used to Control Current Density in a Plating Bath
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United States of America Patent
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Issued Date -
Apr 2, 2015
app pub date -
Oct 2, 2013
filing date -
Oct 2, 2013
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Abstract
This application relates to systems and methods for controlling current density in an electrochemical bath using an anode assembly that comprises a plurality of anodes arranged across a surface of the anode assembly. In one embodiment, each of the anodes may be coupled to a power supply through an intervening electrical switch. A switch controller enables the selection of which anodes should be turned on or off during processing. In this way, current density across the anode assembly can be controlled in a uniform manner by turning on and off select anodes. Turning off a portion of the anodes may lower current density in that region. Likewise, turning on the portion of anodes will increase the current density in that region.
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