Surface State Evaluation Apparatus and Surface State Evaluation Method

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United States of America Patent

APP PUB NO 20150092045A1
SERIAL NO

14191901

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Abstract

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According to one embodiment, a surface state evaluation apparatus includes an imaging unit and a processing unit. The imaging unit is configured to image a first region and a second region of a surface of a sample. A plurality of liquid droplets are provided in the first region, and a plurality of liquid droplets are provided in the second region. The processing unit is configured to evaluate a state of the surface based on a result of comparing a first image of the first region imaged by the imaging unit and a second image of the second region imaged by the imaging unit.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBAMINATO-KU TOKYO 105-8001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KANAMITSU, Shingo Kanagawa-ken, JP 28 113
SAKURAI, Hideaki Kanagawa-ken, JP 172 472

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