OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC DEVICE, AND MEMS DEVICE
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United States of America Patent
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N/A
Issued Date -
Apr 2, 2015
app pub date -
Sep 23, 2014
filing date -
Sep 27, 2013
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An optical filter device includes a wavelength variable interference filter, a housing that stores the wavelength variable interference filter, and a bonding member that fixes a movable substrate to the housing. The housing includes a fixing portion that comes into contact with the bonding member, the fixing portion includes a pedestal fixing surface (first surface) facing a portion of a surface of the movable substrate, a sidewall fixing surface (second surface), continuous with a portion of a periphery of the pedestal fixing surface, which faces a lateral side of the movable substrate, and an intersection surface (third surface) continuous from a remaining portion in a periphery of the pedestal fixing surface in a direction away from the movable substrate, and the bonding member is provided between the substrate surface and the pedestal fixing surface, and between the lateral side and the sidewall fixing surface.
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