High performance e-fuse fabricated with sub-lithographic dimension
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United States of America Patent
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Jul 28, 2015
Grant Date -
Apr 9, 2015
app pub date -
Oct 7, 2013
filing date -
Oct 7, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
An electronic fuse link with lower programming current for high performance and self-aligned methods of forming the same. The invention provides a horizontal e-fuse structure in the middle of the line. A reduced fuse link width is achieved by spacers on sides of pair of dummy or active gates, to create sub-lithographic dimension between gates with spacers to confine a fuse link. A reduced height in the third dimension on the fuse link achieved by etching the link, thereby creating a fuse link having a sub-lithographic size in all dimensions. The fuse link is formed over an isolation region to enhanced heating and aid fuse blow.
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