NOZZLE DESIGNS FOR DISTRIBUTION OF REACTANTS ACROSS SUBSTRATES
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United States of America Patent
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Issued Date -
Apr 9, 2015
app pub date -
Oct 3, 2013
filing date -
Oct 3, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Systems, methods and apparatus for processing a substrate are described. A reactor includes a reaction chamber, a composite nozzle, and a reaction chamber outlet. The composite nozzle extends along a side of the chamber and includes a first nozzle and a second nozzle separate from and parallel the first nozzle. Each nozzle includes a body extending along an axis of elongation, an inlet providing communication between at least one source of a common species and an inner volume of the body, and holes spaced along the axis. The holes provide fluid communication between the inner volume and the chamber. The outlet is configured to allow flow from the composite nozzle through the chamber to the outlet. The first nozzle inlet is positioned at a first end of the first body, and the second nozzle inlet is positioned at a second end of the second body. The second end is opposite the first end of the first body.
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