Lithography apparatus, power supplying method, and article manufacturing method
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United States of America Patent
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Nov 22, 2016
Grant Date -
Apr 16, 2015
app pub date -
Oct 13, 2014
filing date -
Oct 16, 2013
priority date (Note) -
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Abstract
A lithography apparatus has a plurality of driving units each of which drives in synchronization within a specific period, a power source for supplying power required for driving to each driving unit, a plurality of capacitors capable of charging power from the power source, a plurality of switching units for switching whether or not power is supplied from the power source to the driving units and capacitors, and a controller configured to stop supplying the power to the driving units and the capacitors and to drive the driving unit with the power charged in the capacitor, in at least a part of a period of driving in synchronization concerning at least one of the plurality of the driving units, or in at least a part of a period of driving in asynchronization concerning another driving unit different from at least one of the driving unit.
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