Capacitance sensor, acoustic sensor, and microphone

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United States of America Patent

PATENT NO 9380393
APP PUB NO 20150104048A1
SERIAL NO

14402246

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed in each of the divided regions. The plurality of sensing units output a plurality of signals having different sensitivities. At least some sensing units of the sensing units have vibration electrode plates having areas different from the areas of the vibration electrode plates in the other sensing units.

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Patent Owner(s)

Patent OwnerAddress
MMI SEMICONDUCTOR CO LTDJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kasai, Takashi Shiga, JP 63 729
Uchida, Yuki Shiga, JP 92 837

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