Tungsten nitrido precursors for the CVD of tungsten nitride, carbonitride, and oxide films

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United States of America Patent

PATENT NO 9540284
APP PUB NO 20150105234A1
SERIAL NO

14575026

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Abstract

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Embodiments of the invention are directed to a method of preparing a WNx, WNxCy, WNxOz, and WNxCyOz solid by the deposition of a WNx precursor at a temperature below 300° C. The WNx precursor is a tungsten nitrido complex. The deposition can be carried out using a tungsten nitrido complex as a single-source metal organic precursor. In an embodiment of the invention, the deposition can be performed to form a plurality of WNx, WNxCy, WNxOz, WNxCyOz nanoparticles.

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Patent Owner(s)

  • UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anderson, Timothy James Amherst, US 2 2
McClain, K Randall Gainesville, US 1 0
McElwee-White, Lisa Gainesville, US 3 4
O'Donohue, Christopher Conshohocken, US 1 0

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