Ultra high vacuum cryogenic pumping apparatus with nanostructure material

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United States of America Patent

PATENT NO 10145371
APP PUB NO 20150107273A1
SERIAL NO

14059851

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Abstract

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Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anantharaman, Surendra Babu Hsinchu, TW 2 7
Chin, Wei Pingtung, TW 2 7
Kao, Chung-En Toufen Township, TW 30 347
Lu, Victor Y Foster City, US 34 603
Yang, Wen-Cheng Hsinchu, TW 59 71

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