ROLLER DEVICE FOR VACUUM DEPOSITION ARRANGEMENT, VACUUM DEPOSITION ARRANGEMENT WITH ROLLER AND METHOD FOR OPERATING A ROLLER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150110960A1
SERIAL NO

14254695

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A deposition arrangement for depositing a material on a substrate is described. The deposition arrangement includes a vacuum chamber; a roller device within the vacuum chamber; and an electrical heating device within the roller device, wherein the heating device comprises a first end and a second end, and wherein the heating device is held at the first end and at the second end. Also, a method for heating a substrate in a vacuum deposition arrangement is described.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DEPPISCH, Thomas Aschaffenburg, DE 11 32
HENRICH, Jürgen Limeshain, DE 4 4
SAUER, Andreas Grossostheim, DE 41 247
WAGNER, Dirk Utergasse, DE 26 148

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation