ROLLER DEVICE FOR VACUUM DEPOSITION ARRANGEMENT, VACUUM DEPOSITION ARRANGEMENT WITH ROLLER AND METHOD FOR OPERATING A ROLLER
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United States of America Patent
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Issued Date -
Apr 23, 2015
app pub date -
Apr 16, 2014
filing date -
Oct 18, 2013
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Abstract
A deposition arrangement for depositing a material on a substrate is described. The deposition arrangement includes a vacuum chamber; a roller device within the vacuum chamber; and an electrical heating device within the roller device, wherein the heating device comprises a first end and a second end, and wherein the heating device is held at the first end and at the second end. Also, a method for heating a substrate in a vacuum deposition arrangement is described.
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