DEPOSITION DATA PROCESSING APPARATUS, AND APPARATUS AND METHOD FOR MANUFACTURING ORGANIC EL DEVICE
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United States of America Patent
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Issued Date -
Apr 23, 2015
app pub date -
Mar 5, 2013
filing date -
Mar 9, 2012
priority date (Note) -
Abandoned
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Abstract
Provided are a deposition data processing apparatus, an apparatus and a method for manufacturing an organic EL device, which make it possible to check deposition states of constituent layers of each of organic EL elements that are continuously formed on a substrate being conveyed. The deposition data processing apparatus includes a scanning section configured to scan at least two of a plurality of constituent layers that constitute each of the organic EL elements; and a processor configured to accumulate data of the constituent layers scanned by the scanning section at a specific position in a longitudinal direction of the substrate as data of a specific one of the organic EL elements.
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