Vibrating reed, angular velocity sensor, electronic device, and moving object
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United States of America Patent
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Nov 1, 2016
Grant Date -
Apr 30, 2015
app pub date -
Oct 29, 2014
filing date -
Oct 30, 2013
priority date (Note) -
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Abstract
The vibrating reed includes a first main surface and a second main surface that face each other in the thickness direction of a piezoelectric body and a detection unit that vibrates along the thickness direction when detecting. The detection unit includes a groove of which a groove bottom is positioned at a position beyond a midline between the first main surface and the second main surface in the depth direction from an opening formed in the first main surface, an inside surface electrode that is formed on an inside surface facing the inside of the groove, an outside surface electrode that is formed on an outside surface which is opposite the inside surface with the piezoelectric body interposed there between, and a pair of groove bottom electrodes that is provided further on the groove bottom at an interval than the midline and face inside the groove.
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