LOW PRESSURE VAPOR PHASE DEPOSITION OF ORGANIC THIN FILMS
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United States of America Patent
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Apr 5, 2013
filing date -
Nov 17, 1997
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Abandoned
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Abstract
Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuses used to conduct such a method. The method is well-suited to the formation of organic light emitting devices and other display-related technologies.
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