MICROPROCESSING SYSTEM, MICROPROCESSING APPARATUS, AND MICROPROCESSING METHOD
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United States of America Patent
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Issued Date -
Apr 30, 2015
app pub date -
May 23, 2014
filing date -
Oct 31, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
According to one embodiment, a microprocessing system for transferring a concave-convex pattern of a template to a resist layer formed on a substrate by bringing the template with concave-convex formed close or pressing the template against the resist layer, the microprocessing system includes a microprocessing apparatus, and a control device. The microprocessing apparatus includes a stage unit capable of supporting the substrate, a chuck unit opposing the stage unit and capable of bringing the template close or pressing the template against the resist layer, a memory unit capable of storing a relationship between a pressing force of the template and a film thickness of the resist layer, and a control unit configured to control bringing close or pressing of the template to the resist layer. The control device corrects the relationship so that the film thickness distribution falls within a target distribution.
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