X-RAY GENERATION DEVICE AND X-RAY GENERATION METHOD
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United States of America Patent
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Issued Date -
Apr 30, 2015
app pub date -
Mar 15, 2013
filing date -
May 11, 2012
priority date (Note) -
Abandoned
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Abstract
An X-ray generation device is provided with an electron gun unit for emitting an electron beam, and a target unit having a substrate comprised of diamond, and a target body comprised of a material for generating X-rays with incidence of the electron beam thereto and buried in close contact in the substrate. An outer diameter of the target body is in the range of 0.05 to 1 μm. An outer diameter of an irradiation field of the electron beam on the target unit is in the range of 1.1 to 2.5 times the outer diameter of the target body. The X-ray generation device irradiates the target body with the electron beam so that the target body is included in the irradiation field, thereby to generate X-rays from the target body.
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