Salt and photoresist composition comprising the same

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United States of America Patent

PATENT NO 9348221
APP PUB NO 20150118619A1
SERIAL NO

14519915

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Abstract

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A salt represented by the formula (I):

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anryu, Yukako Osaka, JP 23 87
Ichikawa, Koji Osaka, JP 298 1928
Yasue, Takahiro Osaka, JP 27 331

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