Method for determining pattern of mold for imprint, imprint method, and apparatus
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United States of America Patent
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Nov 28, 2017
Issued Date -
N/A
app pub date -
Nov 3, 2014
filing date -
Nov 6, 2013
priority date (Note) -
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Abstract
A determination method for determining a pattern of a mold is disclosed. The pattern of the mold is used in imprint processing of forming a pattern on imprint material by performing the steps of pressing the imprint material on a substrate against the pattern of the mold in an atmosphere containing condensable gas to be liquefied due to compression, curing the imprint material, and releasing the mold from the imprint material. A processor calculates a shrinkage amount of the pattern on the imprint material. The pattern on the imprint material shrinks by desorbing condensate liquid, which is produced through liquefaction of the condensable gas between the imprint material and the pattern of the mold in the pressing step and which is dissolved in the imprint material, from the imprint material after completion of the pressing step.
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