ILLUMINATION OPTICAL SYSTEM AND MICROSCOPE
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United States of America Patent
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Issued Date -
May 7, 2015
app pub date -
Aug 29, 2013
filing date -
Aug 29, 2012
priority date (Note) -
Abandoned
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Abstract
The illumination optical system is configured to illuminate a sample placed on an object plane with light. The illumination optical system includes multiple light source areas which are mutually coherent and arranged separately from one another in a pupil plane of the illumination optical system. Among distances from a center of a pupil of the illumination optical system to centers of the multiple light source areas, at least one of the distances is different from the other distances.
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