SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
May 7, 2015
app pub date -
Mar 19, 2013
filing date -
Apr 19, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body having a surface; a plurality of burls projecting from the surface and having end surfaces to support a substrate; and a thin film stack on the main body surface and forming an electric component, the thin film stack having a conductive layer configured to distribute electrical charge substantially uniformly throughout a plane of the stack in which the conductive layer is positioned.
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