METHOD FOR PRODUCING M-PLANE NITRIDE-BASED LIGHT-EMITTING DIODE

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United States of America Patent

SERIAL NO

14582591

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Provided is a novel method for producing an m-plane nitride-based LED, the method making it possible to obtain an m-plane nitride-based LED reduced in forward voltage. The method comprising (i) a step of forming an active layer consisting of a nitride semiconductor over an n-type nitride semiconductor layer in which an angle between the thickness direction and the m-axis of a hexagonal crystal is 10 degrees or less, (ii) a step of forming an AlGaN layer doped with a p-type impurity over the active layer, (iii) a step of forming a contact layer consisting of InGaN is formed on the surface of the AlGaN layer, and (iv) a step of forming an electrode on the surface of the contact layer.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI CHEMICAL CORPORATIONCHIYODA-KU TOKYO 100-8251
SEOUL VIOSYS CO LTD65-16 SANDAN-RO 163 BEON-GIL DANWON-GU GYEONGGI-DO ANSAN-SI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurihara, Kaori Ushiku-shi, JP 18 342
Shimoyama, Kenji Ushiku-shi, JP 40 368
Takai, Shinji Ushiku-shi, JP 8 58
Takeshita, Yutaro Ushiku-shi, JP 3 7

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