Manufacturing method of oscillator, manufacturing method of circuit device and the circuit device
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United States of America Patent
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Jan 26, 2016
Grant Date -
May 14, 2015
app pub date -
Nov 10, 2014
filing date -
Nov 11, 2013
priority date (Note) -
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Abstract
A manufacturing method of an oscillator is a manufacturing method of an oscillator which includes a vibrator and a semiconductor circuit device including an oscillation part connected to the vibrator and a control part to switch an operation mode between a normal mode in which the oscillation part performs an oscillation operation and an inspection mode in which characteristics of the vibrator are inspected, and the manufacturing method includes preparing the semiconductor circuit device in which the operation mode is set to the inspection mode, connecting the semiconductor circuit device and the vibrator electrically, and inspecting the characteristics of the vibrator which is in a state electrically connected to the semiconductor circuit device.
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