Piezoelectric thin-film resonator, filter and duplexer utilizing a piezoelectric film having an air space

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United States of America Patent

PATENT NO 9496848
APP PUB NO 20150130560A1
SERIAL NO

14527273

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Abstract

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A piezoelectric thin-film resonator includes, a substrate, a piezoelectric film provided on the substrate, and a lower electrode and an upper electrode that face each other through the piezoelectric film. The piezoelectric film has an air space that is provided in at least part of an outer circumferential part of a resonance region in which the upper and lower electrodes face each other through the piezoelectric film and is not provided in a central part of the resonance region.

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Patent Owner(s)

  • TAIYO YUDEN CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishihara, Tokihiro Tokyo, JP 120 1661
Sakashita, Takeshi Tokyo, JP 126 1952
Yokoyama, Tsuyoshi Tokyo, JP 72 913

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