Foreign substance detection method, foreign substance detection apparatus, exposure method, and method of manufacturing device

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United States of America Patent

PATENT NO 9599903
APP PUB NO 20150131065A1
SERIAL NO

14533733

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Abstract

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A foreign substance detection method includes: judging the presence/absence of a foreign substance by measuring a surface condition of a substrate; measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging that a foreign substance exists; and determining whether an adhering location of the foreign substance determined to exist in the judging is the substrate, based on a measurement result obtained in the measurement.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kosugi, Yuji Utsunomiya, JP 23 84
Nakamura, Tadao Utsunomiya, JP 36 394
Nakazawa, Tomohisa Nasu-gun, JP 1 0

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