Flow control system with build-down system flow monitoring

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United States of America Patent

PATENT NO 9733649
SERIAL NO

14404418

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Abstract

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To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics of the flow control system, and can be significantly downsized and reduced in cost.

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Patent Owner(s)

  • FUJIKIN INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hidaka, Atsushi Osaka, JP 31 341
Ikeda, Nobukazu Osaka, JP 232 4039
Nagase, Masaaki Osaka, JP 84 993
Nishino, Kouji Osaka, JP 165 2289

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