Deceleration apparatus for ribbon and spot beams

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United States of America Patent

PATENT NO 9824850
SERIAL NO

14605985

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Abstract

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A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps to shield the ion beam from external potentials are provided. Electrodes whose position and potentials are adjustable are provided, on opposite sides of the beam, to ensure that the shape of the decelerating and deflecting electric fields does not significantly deviate from the optimum shape, even in the presence of the significant space-charge of high current low-energy beams of heavy ions.

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Patent Owner(s)

  • ADVANCED ION BEAM TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Collart, Erik North Andover, US 5 4
Wan, Zhimin Sunnyvale, US 68 225
White, Nicholas Manchester, US 34 408

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