Replacement gate structures and methods of manufacturing

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United States of America Patent

PATENT NO 9263442
APP PUB NO 20150137267A1
SERIAL NO

14606224

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Gate structures and methods of manufacturing is disclosed. The method includes forming a continuous replacement gate structure within a trench formed in dielectric material. The method further includes segmenting the continuous replacement gate structure into separate replacement gate structures. The method further includes forming insulator material between the separate replacement gate structures.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anderson, Brent A Jericho, US 533 6628
Nowak, Edward J Essex Junction, US 635 14932

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