SEMICONDUCTOR WAFER, METHOD OF PRODUCING A SEMICONDUCTOR WAFER AND METHOD OF PRODUCING A COMPOSITE WAFER

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United States of America Patent

SERIAL NO

14568165

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A semiconductor wafer is provided. The semiconductor wafer comprises a sacrificial layer and a semiconductor crystal layer above a semiconductor crystal layer forming wafer, the semiconductor crystal layer forming wafer, the sacrificial layer and the semiconductor crystal layer being arranged in the order of the semiconductor crystal layer forming wafer, the sacrificial layer and the semiconductor crystal layer, wherein the semiconductor wafer comprises a diffusion inhibiting layer that inhibits diffusion of a first atom of one type selected from a plurality of types of atoms constituting the semiconductor crystal layer forming wafer or the sacrificial layer, at any cross-sectional position between (a) the interface of the semiconductor crystal layer forming wafer that faces the sacrificial layer and (b) a middle of the semiconductor crystal layer.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYCHIYODA-KU TOKYO 100-8921
SUMITOMO CHEMICAL COMPANY LIMITEDTOKYO 103-6020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HATA, Masahiko Phoenix, US 79 579
ITATANI, Taro Tsukuba-shi, JP 20 116
MAEDA, Tatsuro Tsukuba-shi, JP 11 89
OSADA, Takenori Tsukuba-shi, JP 14 38
TAKADA, Tomoyuki Tsukuba-shi, JP 77 523
YASUDA, Tetsuji Tsukuba-shi, JP 24 105

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