Piezoelectric actuator and method of making a piezoelectric actuator

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United States of America Patent

PATENT NO 9266326
APP PUB NO 20150138276A1
SERIAL NO

14397333

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Abstract

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In one example, a piezoelectric actuator includes a piezoelectric material, a first conductor on a first part of the piezoelectric material, and a membrane bonded to the first conductor with an adhesive. The first conductor has a root mean square surface roughness of at least 10 nm at the bonding interface with the membrane.

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Patent Owner(s)

  • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abbott,, Jr James Elmer Albany, US 50 84
Chen, Chien-Hua Corvallis, US 404 2917
Pollard, Jeffrey R Corvallis, US 28 162

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