Forming magnetic microelectromechanical inductive components

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United States of America Patent

PATENT NO 9193584
APP PUB NO 20150140686A1
SERIAL NO

14608817

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Abstract

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A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gallagher, William J Ardsley, US 82 644
O'Sullivan, Eugene J Nyack, US 123 1618
Wang, Naigang Ossining, US 100 416

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