Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device

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United States of America Patent

PATENT NO 9818929
SERIAL NO

14541528

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Importance

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Abstract

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An ultrasonic device includes a substrate having a first opening, a second opening and a wall part partitioning the first opening and the second opening; a first vibration film and a second vibration film which close the first opening and the second opening respectively; a first piezoelectric element and a second piezoelectric element which are formed on surfaces of the first vibration film and the second vibration film opposite to the substrate; an acoustic matching layer which is disposed within the first opening and the second opening so as to come into contact with the first vibration film and the second vibration film.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kiyose, Kanechika Nagano, JP 101 426

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