Dispensing apparatus and dispensing method

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United States of America Patent

PATENT NO 9776216
SERIAL NO

14092533

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A dispensing method is disclosed that includes the following steps: a cleaning sleeve is provided to surround a spray member. A first fluid is previously dispensed from a first fluid outlet of the spray member. A second fluid is sprayed from a second fluid outlet of the cleaning sleeve to clean the spray member. The cleaning sleeve is opened or slid away from the spray member, such that the first fluid outlet of the spray member is exposed to a substrate. The first fluid is dispensed from the first fluid outlet of the spray member to the substrate.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chuang, Kuo-Sheng Hsinchu, TW 51 198
Ku, Wen-Yu Hsinchu, TW 19 139
Lin, Chin-Hsiang Hsin-chu, TW 407 5626
Yu, Weibo Hsinchu, TW 8 45

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