PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME
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United States of America Patent
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Issued Date -
May 28, 2015
app pub date -
Dec 8, 2014
filing date -
Sep 30, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of operating a particle beam system includes digitally controlling first and second digitally controlled modules of the particle beam system, and sending digital command data to the first and second digitally controlled modules. The digital command data include at least a first command for the first digitally controlled module and at least a second command for the second digitally controlled module. The digital command data is generated based on information representing: a) a time when the first command is to be executed by the first digitally controlled module; and b) a time when the second command is to be executed by the second digitally controlled module.
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