Thermal flow sensors having isolated membranes

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United States of America Patent

PATENT NO 9366557
APP PUB NO 20150153209A1
SERIAL NO

14096974

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Thermal flow sensors are disclosed. An example thermal flow sensor includes a chip substrate; a heater mounted to a first membrane on the chip substrate; and a temperature sensor mounted to a second membrane on the chip substrate, the second membrane being isolated from the first membrane by material of the chip substrate.

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Patent Owner(s)

  • ITRON, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Soreefan, Ibne Union, US 22 33

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