Method to fabricate a substrate including a material disposed on the edge of one or more non through hole formed in the substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9277656
APP PUB NO 20150156890A1
SERIAL NO

14551977

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Method for producing a substrate comprising at least one getter material arranged on the walls of at least one blind hole, comprising at least the steps of:

    etching the blind hole through a first face of the substrate,depositing a continuous layer of getter material on the whole of the first face of the substrate and at least on the side walls of the blind hole,etching part of the layer of getter material located on the first face of the substrate such that said first face of the substrate is no longer covered by the getter material,in which the step of etching part of the layer of getter material comprises the implementation of an etching by ion beam machining, or chemical-mechanical planarization or polishing.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESBAT LE PONANT 25 RUE LEBLANC PARIS 75015

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ferrandon, Christine Sassenage, FR 4 11
Giroud, Sophie Saint-Egreve, FR 8 29

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 1, 2027
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00