Fine structure, optical member, antireflection film, water-repellent film, substrate for mass spectrometry, phase plate, process for producing fine structure, and process for producing antireflection film
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United States of America Patent
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Nov 12, 2019
Grant Date -
Jun 11, 2015
app pub date -
Jul 3, 2013
filing date -
Jul 4, 2012
priority date (Note) -
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Abstract
Provided are an antireflection film having a high antireflection effect and a production process therefor, an optical member excellent in antireflection effect, a water-repellent film having excellent water repellency, a substrate for mass spectrometry having high detection sensitivity, a high-accuracy phase plate, and a fine structure that can be used in the foregoing and a production process therefor. The fine structure is a structure, including multiple conical portions on a surface thereof, in which the conical portions have a mesostructure; and the mesostructure includes a structure having mesopores.
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