Micro-plasma field effect transistors

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United States of America Patent

PATENT NO 9269521
APP PUB NO 20150162158A1
SERIAL NO

14608298

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Abstract

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In some aspects, a micro-plasma device comprises a plasma gas enclosure containing at least one plasma gas, and a plurality of electrodes interfaced with the plasma gas enclosure. In other aspects, a micro-plasma circuitry apparatus comprises a first layer having a cavity formed therein and a second layer having a circuit formed therein. The circuit includes a micro-plasma circuit (“MPC”) that includes one or more micro-plasma devices (“MPDs”). The first layer of the circuit is bonded to the second layer of the circuit thereby forming an enclosure that contains at least one plasma gas. An excitation voltage is applied to a drain electrode of the MPDs to generate a conductive plasma path between the drain electrode and a source electrode.

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Patent Owner(s)

  • UNIVERSITY OF UTAH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tabib-Azar, Massood Salt Lake City, US 16 54

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