PLANAR ACCELEROMETER WITH INTERNAL RADIAL SENSING AND ACTUATION
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United States of America Patent
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Jun 18, 2015
app pub date -
Dec 12, 2014
filing date -
Dec 13, 2013
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Abstract
An inertial sensor that includes a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator is disclosed. At least one excitation or forcing electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator, and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern around the central rigid support. The planar resonator has a simple pair of in-plane vibration modes.
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