DRAWING APPARATUS, DRAWING METHOD AND MANUFACTURING METHOD OF ARTICLE
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United States of America Patent
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Issued Date -
Jun 18, 2015
app pub date -
Dec 8, 2014
filing date -
Dec 18, 2013
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A drawing apparatus includes a detection unit which detects defective beam and a control unit which controls irradiation with normal beam and the irradiation position in the sub-scanning direction. The control unit controls the irradiation such that, in accordance with a detection result of the detection unit, a normal beam is irradiated instead of the defective beam at a position that has been planned to be irradiated with the defective beam by changing an amount of change in the irradiation positions of the plurality of beams from the predetermined amount and, in a case in which the detection unit stops detecting the defective beam, the amount of change in the irradiation position of the plurality of beams is restored to the predetermined amount.
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