WORKPIECE CUTTING METHOD
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United States of America Patent
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app pub date -
Aug 1, 2013
filing date -
Aug 22, 2012
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Abandoned
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Abstract
The object cutting method comprises a step of locating a converging point of laser light within a monocrystal sapphire substrate, while using a rear face of the monocrystal sapphire substrate as an entrance surface of the laser light, and relatively moving the converging point along each of a plurality of lines to cut set parallel to the m-plane and rear face of the substrate, so as to form a modified region within the substrate along each line and cause a fracture to reach the rear face. In this step, ΔY=(tan α)·(t−Z)±[(d/2)−m] is satisfied, where m is the amount of meandering of the fracture in the front face.
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