STACKABLE MULTI-PORT GAS NOZZLES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150176127A1
SERIAL NO

14637337

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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One embodiment provides a reactor for material deposition. The reactor includes a chamber and at least one gas nozzle. The chamber includes a pair of susceptors, each having a front side and a back side. The front side mounts a number of substrates. The susceptors are positioned vertically so that the front sides of the susceptors face each other, and the vertical edges of the susceptors are in contact with each other, thereby forming a substantially enclosed narrow channel between the substrates mounted on different susceptors. The gas nozzle includes a gas-inlet component situated in the center and a detachable gas-outlet component stacked around the gas-inlet component. The gas-inlet component includes at least one opening coupled to the chamber, and is configured to inject precursor gases into the chamber. The detachable gas-outlet component includes at least one opening coupled to the chamber, and is configured to output exhaust gases from the chamber.

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Patent Owner(s)

Patent OwnerAddress
SOLARCITY CORPORATION3055 CLEARVIEW WAY SAN MATEO CA 94402

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ding, Peijun Saratoga, US 130 2957
Poppe, Steve Pleasanton, US 7 230
Rozenzon, Yan San Carlos, US 21 298

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