DIFFRACTION GRATING AND DIFFRACTION GRATING PRODUCING METHOD
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United States of America Patent
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Jun 25, 2015
app pub date -
Dec 12, 2014
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Dec 20, 2013
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Abstract
A method for producing a blazed diffraction grating made of a crystal material of InP or InAs according to the present invention is characterized in that when the blazed diffraction grating is formed by forming a plurality of grating grooves by machining a process target surface of a workpiece W (step S150), the grating grooves are formed in such a manner that the surface that receives the largest quantity of incident light among surfaces constituting each grating is set on a crystal orientation plane of the crystal material.
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