Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
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United States of America Patent
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Oct 11, 2016
Grant Date -
Jun 25, 2015
app pub date -
Dec 4, 2014
filing date -
Dec 25, 2013
priority date (Note) -
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Abstract
The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate, and a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face of the mirror, wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators, and the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center and a periphery of the mirror.
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