Method for evaluating optical image of pattern, recording medium, and information processing apparatus

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United States of America Patent

PATENT NO 9547230
APP PUB NO 20150177609A1
SERIAL NO

14572651

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Abstract

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A method being performed by a processor includes, acquiring data of patterns of a plurality of cells that include an identified pattern for which an evaluation value of an optical image falls outside a first allowable range among patterns in which each a pattern being single cell alone, creating the pattern of a mask by arranging the patterns of the plurality of cells that include the identified pattern, and evaluating an optical image of the identified pattern in the created pattern of the mask.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Tadashi Saitama, JP 102 1366
Mikami, Koji Nikko, JP 54 402

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