Substrate Processing Module, Substrate Processing Apparatus Including the same, and Substrate Transferring Method
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United States of America Patent
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Issued Date -
Jun 25, 2015
app pub date -
Dec 17, 2014
filing date -
Dec 20, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
There are provided a substrate processing module, and substrate processing apparatus including the same, and a substrate transferring method. The substrate processing module includes: a chamber having a passage formed on one side thereof and allowing a substrate to enter or exit therethrough; a first susceptor installed within the chamber, having at least one through hole formed in an upper surface thereof, and allowing the substrate to be placed thereon; a second susceptor installed within the chamber and allowing the substrate to be placed thereon; a rotary member provided within the chamber and rotating, based on a preset position; a holder connected to the rotary member and having a mounting surface allowing the substrate to be placed thereon; and a holder driving module driving the rotary member to move the holder to a standby position corresponding to the first susceptor or to a delivery position corresponding to the second susceptor.
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