Vertical cavity surface emitting laser and atomic oscillator
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United States of America Patent
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Jan 5, 2016
Grant Date -
Jun 25, 2015
app pub date -
Dec 18, 2014
filing date -
Dec 20, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated by the active layer, and an angle formed by a side surface of the first distortion imparting portion and an upper surface of the substrate, and an angle formed by a side surface of the second distortion imparting portion and the upper surface of the substrate are greater than an angle formed by a side surface of the resonance portion and the upper surface of the substrate.
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