Vibrating device and manufacturing method therfor

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United States of America Patent

PATENT NO 9553561
APP PUB NO 20150180449A1
SERIAL NO

14643286

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Abstract

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A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.

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Patent Owner(s)

  • MURATA MANUFACTURING CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hase, Takashi Nagaokakyo, JP 89 1115
Kishi, Takehiko Nagaokakyo, JP 10 73
Nishimura, Toshio Nagaokakyo, JP 91 688
Umeda, Keiichi Nagaokakyo, JP 42 585

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