PHOTO-PATTERNABLE DIELECTRIC MATERIALS AND FORMULATIONS AND METHODS OF USE

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United States of America Patent

SERIAL NO

14644416

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Abstract

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Silsesquioxane polymers, silsesquioxane polymers in negative tone photo-patternable dielectric formulations, methods of forming structures using negative tone photo-patternable dielectric formulations containing silsesquioxane polymers, and structures made from silsesquioxane polymers.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES INCGRAND CAYMAN CAYMAN ISLANDS GRAND CAYMAN CAYMAN ISLANDS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allen, Robert D San Jose, US 65 948
Brock, Phillip J San Jose, US 20 160
Davis, Blake W San Jose, US 14 241
Lin, Qinghuang Yortown Heights, US 150 2181
Miller, Robert D San Jose, US 159 2225
Nelson, Alshakim San Jose, US 55 622
Sooriyakumaran, Ratnam San Jose, US 126 2261

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