Imprint apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10073339
APP PUB NO 20150190961A1
SERIAL NO

14565520

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Abstract

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The present invention provides an imprint apparatus which performs an imprint process of molding an imprint material on a substrate with a mold and forming a pattern on the substrate, the apparatus including a detector configured to detect a shearing force generated in at least one of the mold and the substrate in a case where a pattern of the mold and a region of the substrate are aligned with each other with the imprint material on the substrate and the mold being in contact with each other, and a controller configured to control the imprint process based on the detected shearing force.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hiura, Mitsuru Utsunomiya, JP 10 107
Murakami, Yosuke Utsunomiya, JP 134 661
Nakagawa, Kazuki Utsunomiya, JP 38 93

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